2 areas (at the area of the old INOMAR and INT):

Total area is more than 4000 sq. meters:

Clean room

Consisting of 260 square meter total area, Cleanroom was divided into 5 main modules with different clean levels as below:

    * Lithography module – Class 1000
    * Service module – Class 100 000
    * Wet etching & cleaning module – Class 10 000
    * Characterization module – Class 10 000
    * Deposition & Dry etching module – Class 10 000

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