2 areas (at the area of the old INOMAR and INT):
Total area is more than 4000 sq. meters:
Clean room
Consisting of 260 square meter total area, Cleanroom was divided into 5 main modules with different clean levels as below:
* Lithography module – Class 1000
* Service module – Class 100 000
* Wet etching & cleaning module – Class 10 000
* Characterization module – Class 10 000
* Deposition & Dry etching module – Class 10 000

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